Preparation and characterization of a micro-supercapacitor with three-dimensional microelectrode arrays

Xiangyu Li,Xiaofeng Wang,Rui Ma,Wushuang Lv,Zheng You
DOI: https://doi.org/10.4028/www.scientific.net/KEM.562-565.1196
2013-01-01
Key Engineering Materials
Abstract:With the development of the MEMS technology and the more widely-used micro-systems, micro-power devices are developed for portable consumer electronics. ([1]) The MEMS supercapacitor is one of the most important parts for micro-powers. In this paper, a micro-supercapacitor was designed and fabricated with three-dimensional microelectrode arrays configuration. It has been tested by scanning electron microscopy, Cyclic Voltammeter, Galvanostatical charge/discharge curve and electrochemical impedance spectroscopy. These posts were 50 mu m in diameter and 100 mu m tall; with foot print area of 2x2mm(2). The capacitance is 89.52mF/cm(2). The biggest feature in this paper is that the two plates of the supercapacitor are both three-dimensional microelectrode arrays which are shown to offer significant advantages.
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