A High-Performance Three-Dimensional Micro Supercapacitor Based on Ripple-Like Ruthenium Oxide–carbon Nanotube Composite Films

Xiaofeng Wang,Yajiang Yin,Chenglong Hao,Zheng You

DOI: https://doi.org/10.1016/j.carbon.2014.10.087

IF: 10.9

2014-01-01

Carbon

Abstract:A micro-supercapacitor with a three-dimensional configuration has been fabricated using an inductively coupled plasma etching technique. A ruthenium oxide–carbon nanotube (CNT) composite with a ripple-like morphology is successfully synthesized using a cathodic deposition technique while using silica-based three-dimensional microstructures as a template. The desired network of carbon nanotubes in the composite facilitates electrolyte penetration and proton exchange/diffusion. A single three dimensional microelectrode is studied using cyclic voltammetry, and a specific capacitance of 272mF·cm−2 is observed at 5mVs−1 in a neutral Na2SO4 solution. The accelerated cycle life is tested at 80mVs−1, and a satisfactory cyclability is observed. When placed on a chip, the symmetric cell exhibits good supercapacitor properties, the specific capacitance up to 37.23mFcm−2 and specific power density up to 19.04mWcm−2 were obtained at 50mAcm−2.