Design and fabrication of a RuO2 microelectrode-based micro-supercapacitor

Zhou Yang,Wang Xiaofeng
DOI: https://doi.org/10.3772/j.issn.1002-0470.2012.04.016
2012-01-01
Abstract:A RuO 2 micro-supercapacitor with a side-by-side electrode configuration structure was designed and fabricated. It was composed of the micro-structure, the micro-electrode, and the functional RuO 2 film on the electrode. The micro-structure was made by the MEMS technology, while the micro-electrode was made by electroplating the functional RuO 2 film on the surface of the current collector. The electrochemical test results showed that the micro-supercapacitor had the specific capacity of 0.012F·cm -2 and the energy density of 0.006J·cm -2. The performance of the RuO 2-CNT (carbon nanotube) composite functional film was studied. The cyclic voltammetry (CV) and electrochemical impedance spectroscopy (EIS) curves showed that compared with the RuO 2 film, the RuO 2-CNT composite film greatly decreased the internal resistance, and improved the energy-storage density and the charge-CNT discharge quality of the micro-capacitor. Anyway, the micro-capacitor can satisfy the energy requirements of a lot of microsystems for its great stability and discharge power.
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