Electrochemical Performance of Three-Dimensional Microelectrode Arrays

Xiao-feng WANG,Xiang-yu LI,Xue-kun CHEN,Yang ZHOU,Zheng YOU
2012-01-01
Abstract:With the development of MEMS technology,the worldwide thirst for electric products in microscale has an enormous impact on micro-power.The MEMS super-capacitor is one of the most important parts for micro-powers.In this paper,RuO2 microelectrode arrays were fabricated and tested by scanning electron microscopy (SEM),cyclic voltammetry (CV),and electrochemical impedance spectroscopy (EIS).These posts were 50 μm in diameter and 100 pm in height,with the foot print area of 2 mm×2 mm.The capacitance was 2.43 F/cm2.These 3-D microelectrode arrays exhibited satisfactory electrochemical performance.The performance of micro-super capacitors on 3-D microstructure was shown to offer significant advantages,such as small areal footprint and short diffusion lengths,in comparison with that on 2-D microelectrode.
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