Research on the structure of ultrathin Si PIN detector

Peiquan Wang,Dayu Tian,Shaonan Wang,Min Yu,Yufeng Jin
DOI: https://doi.org/10.1109/NEMS.2013.6559808
2013-01-01
Abstract:Ultrathin PIN Detectors have been applied in radiation detection for particle identification and etc. In this paper, we present simulation research on the structure of ultrathin Si PIN detector based on bonding technology by using Sentaurus TCAD tool. The normal structure and reverse structure of ultrathin Si PIN detector are simulated and compared. The reverse current of detector and electrical field distribution are analyzed. It is found that the reverse current of the reverse structure increases fast when the voltage exceeds a threshold value. It is explained by considering the parasitic MOS structure. This effect can be reduced by increasing the thickness of buried SiO2.
What problem does this paper attempt to address?