A research on thick PIN detector with high breakdown voltage

Dongmei Wu,Min Yu,Shenglin Ma,Lu Zhang,Chunxi Wei,Xiaohang Zhang,Qiang Li,Guanhuang Li,Haomin Wang,Jinyan Wang,Yufeng Jin
DOI: https://doi.org/10.1149/1.3360765
2010-01-01
ECS Transactions
Abstract:The Thick PIN detector fabricated on high resistivity silicon is widely applied for high energy particle detection. In this work, the structure of detector is investigated and optimized to achieve high breakdown voltage, which is necessary to deplete the detector. Structures of field plate and guard ring are investigated. The effects of field plate width and distance to guard ring are investigated by simulation to optimize the device structure. The analysis on the electric field distribution within the detector is performed. The silicon wafer with high resistivity is applied in the experiments. Devices are fabricated for breakdown voltage research. It is shown that with the structure of field plate and guard ring, the breakdown voltage of device on high resistivity silicon can be increased effectively. The optimized structure of detector is presented. The thick PIN detector with thickness of 1.5mm is fabricated and tested.
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