Abstract:AlN is an ultra-wide bandgap semiconductor which has been developed for applications including power electronics and optoelectronics. Thermal management of these applications is the key for stable device performance and allowing for long lifetimes. AlN, with its potentially high thermal conductivity, can play an important role serving as a dielectric layer, growth substrate, and heat spreader to improve device performance. However, the intrinsic high thermal conductivity of bulk AlN predicted by theoretical calculations has not been experimentally observed because of the difficulty in producing materials with low vacancy and impurity levels, and other associated defect complexes in AlN which can decrease the thermal conductivity. This work reports the growth of thick AlN layers by MOCVD with an air-pocketed AlN layer and the first experimental observation of intrinsic thermal conductivity from 130 K to 480 K that matches density-function-theory calculations for single crystal AlN, producing some of the highest values ever measured. Detailed material characterizations confirm the high quality of these AlN samples with one or two orders of magnitude lower impurity concentrations than seen in commercially available bulk AlN. Measurements of these commercially available bulk AlN substrates from 80 K to 480 K demonstrated a lower thermal conductivity, as expected. A theoretical thermal model is built to interpret the measured temperature dependent thermal conductivity. Our work demonstrates that it is possible to obtain theoretically high values of thermal conductivity in AlN and such films may impact the thermal management and reliability of future electronic and optoelectronics devices.

Local thermal conductivity of polycrystalline AlN ceramics measured by scanning thermal microscopy and complementary scanning electron microscopy techniques

Thermal and Electrical Properties of EP/AlN Nanocomposites at Different Temperatures

Thermal conductivity of crystalline AlN and the influence of atomic-scale defects

Enhanced Thermal and Dielectric Performance of Epoxy Resin/aluminum Nitride Nanocomposites at High Temperatures

Experimental Observation of High Intrinsic Thermal Conductivity of AlN

Tunable thermal conductivity of thin films of polycrystalline AlN by structural inhomogeneity and interfacial oxidation

Growth-microstructure-thermal property relations in AlN thin films

The quantitative investigation of the lattice oxygen and grain edge oxygen on the thermal conductivity of aluminum nitride ceramics

Microstructure and thermal conductivity of aluminium nitride with (CaY)F3 as the sintering aid

Microstructure and Thermal Conductivity of Spark Plasma Sintering AlN Ceramics

High Thermal Conductivity of Submicrometer Aluminum Nitride Thin Films Sputter-Deposited at Low Temperature

Characterization of the Microstructure of Sintered Aln by Sem and Tem

Microstructure and thermal conductivity of aluminium nitride with (YCa)F3 as sintering aid

Numerical investigation of heat transfer in aluminum nitride ceramics with engineered microstructures

Thermal Conductivity of AlN Ceramics Sintered with CaF2 and YF3

Improvement in mechanical properties in AlN-h-BN composites with high thermal conductivity

Phonon heat conduction in Al1-xScxN thin films

Experimental observation of ballistic to diffusive transition in AlN thin films

Fabrication and thermal conductivity of AlN/BN ceramics by spark plasma sintering

The impact of film thickness and substrate surface roughness on the thermal resistance of aluminum nitride nucleation layers

Effects of AlN Content and Sintering Atmospheres on the Thermal Conductivity of Hot-Pressed SiC Ceramics