Si-Nanocrystals with Bimodal Size Distribution in Evenly Annealed SiO Revealed with Raman Scattering

Ke Wei-Wei,Feng Xue,Huang Yi-Dong
DOI: https://doi.org/10.1088/0256-307x/29/1/016402
2012-01-01
Abstract:The size distribution of Si-nanocrystals (Si-ncs) in evenly annealed SiO is investigated with transmission electron microscopy (TEM), x-ray diffraction (XRD), and Raman scattering. Two groups of Si-ncs with very different most probable diameters are identified, where one is >6nm and the other one is <2 nm. Both of them increase gradually with increasing annealing temperature. Such a phenomenon is observed directly by TEM for samples with larger Si-ncs (>10 nm) and it can be revealed clearly for all samples by Raman spectra with two components (similar to 500 cm(-1) and similar to 520 cm(-1)). The results of XRD show the average effect. The experimental results indicate that the common assumption of Si-nc size distribution with single most probable diameter is not always proper and the possible mechanisms are briefly discussed.
What problem does this paper attempt to address?