The Effect of De-Ionized Water Rinsing after Immersion in Hydrofluoric Acid on the Electrical Conductivity of Silicon Nanomembranes

Xiang-Fu Zhao,Ping Han,Qiang Guo
DOI: https://doi.org/10.1016/j.tsf.2011.09.051
IF: 2.1
2012-01-01
Thin Solid Films
Abstract:Electrical conductivity of 28 and 220-nm thick silicon membranes was measured by the van der Pauw method in dry air (relative humidity <5%) at room temperature (around 20 degrees C). Immediately after hydrofluoric acid immersion the conductivity increases several orders of magnitude because of surface-induced band bending; it then drops and reaches the level of samples with a native oxide surface in several weeks due to the surface's re-oxidation. The oxidation rate is found to increase with the de-ionized water rinsing time, which is confirmed by X-ray photo electron spectroscopy measurements. (C) 2011 Elsevier B.V. All rights reserved.
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