Silicon Content Design of CrSiN Films for Good Anti-Corrosion and Anti-Wear Performances in NaOH Solution

Haixin Wang,Yuwei Ye,Chunting Wang,Guangan Zhang,Wei Liu
DOI: https://doi.org/10.1088/2051-672x/aab522
2018-01-01
Abstract:The CrSiN films with different silicon contents were fabricated by medium frequency magnetron sputtering. The 304L stainless steel and Si (1 0 0) wafer were used for substrate specimens. Film plasticity, corrosion and tribological behaviors in 0.1 M NaOH solution were systematically investigated. Results show that the plasticity of CrN film could be improved by the addition of silicon. During the corrosion test, with the increase of silicon content, the corrosion current density exhibited a descending trend and impedance presented a rising trend. The COF and wear rate of as-prepared CrSiN film initially decreased and then increased as the silicon content increased. The CrSiN film with 12.7 at.% Si exhibited the lowest COF of 0.04 and a wear rate of 6.746 x 10(-8) mm(3) Nm(-1) in 0.1 M NaOH solution.
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