Abstract:A three-axis micromachined accelerometer with a proof mass suspended electrostatically in six degrees of freedom was designed and tested to evaluate its performance of this sensitive sensor for potential microgravity space applications. The device is based on a glass/silicon/glass bonding structure, fabricated by bulk micromachining process, and operated with force-balance technology. The motion of the proof mass with respect to each side is fully servo-controlled by capacitive position sensing and electrostatic force feedback. The design and simulation of multiaxis suspension control loops are presented based on the stiffness requirements for different full-scale ranges. The ground test of this sensitive accelerometer is facilitated by setting the vertical axis at a relatively high measurement range to counteract the one-g gravity, whereas the range in two lateral axes can be set as low as possible to achieve high sensitivity. Detailed experimental results of electrostatic suspension, three-axis accelerometer, and its cross-axis sensitivity are presented with the device operated initially in an atmospheric environment. The preliminary test results of a prototype accelerometer show that a sensitivity up to 688.8 V/g and a noise density down to 3 mu g/Hz(1/2) can be achieved by setting an extremely low full-scale range of +/- 2.90 mg. The results also show that much different stiffness levels in the design of three-axis suspension is a major source of cross coupling effects in the prototype accelerometer.

Fabrication and Test of a Capacitive Biaxial Microaccelerometer

An In-Plane Low-Noise Accelerometer Fabricated with an Improved Process Flow

Study of a Novel Micromachined Capacitive Accelerometer

Design of Force-Balance Capacitive Accelerometer

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

Design and Fabrication of a Micro-Electromechanical System Sandwich Capacitive Accelerometer

Design and Fabrication of a Mems Capacitive Accelerometer Based on Double-Device-layers SOI Wafer.

Design and Fabrication of a Highly Symmetrical Capacitive Triaxial Accelerometer

The Design and Fabrication of A Miniaturized Differential-Capacitive Triaxial Accelerometer

Design and Virtual Fabrication Process of a New Kind of Capacitive Accelerometer

Design and Fabrication Research on a Capacitive Accelerometer

A Novel Sandwich Capacitive Accelerometer with A Double-Sided 16-Beam-mass Structure

Fabrication of a MEMS Capacitive Accelerometer with Symmetrical Double-Sided Serpentine Beam-Mass Structure

A Novel Capacitive Accelerometer with A Highly Symmetrical Double-Sided Beam-Mass Structure

Silicon Micro-Accelerometer with Mg Resolution, High Linearity and Large Frequency Bandwidth Fabricated with Two Mask Bulk Process

A Novel Biaxial Resonant Micro Accelerometer with Microleverage Mechanism

Design And Implementation Of A Novel Cmos-Mems Single Proof-Mass Tri-Axis Accelerometer

3-axis Capacitive Low-Gravity MEMS Accelerometer with Zero Cross-Axis Sensitivity in a Commercial Process

A novel capacitive accelerometer with an eight-beam-mass structure by self-stop anisotropic etching of (1 0 0) silicon

Performance of a Sensitive Micromachined Accelerometer with an Electrostatically Suspended Proof Mass

Design, Fabrication, And Performance Characterization Of Ltcc-Based Capacitive Accelerometers