3-axis Capacitive Low-Gravity MEMS Accelerometer with Zero Cross-Axis Sensitivity in a Commercial Process

V. Chodavarapu,A. Merdassi

2013-05-12

Abstract:We present the design and fabrication of a 3-axis capacitive accelerometer that is developed using SOIMUMPS, which is a commercial multi-user process available from MEMSCAP. The accelerometer is designed to measure ultra-low acceleration with a range of ±100mg. We introduce a new technique to reduce or eliminate the crossaxis sensitivity based on the use of decoupled frames and appropriate mechanical springs that are sensitive for each specific axis. The proposed accelerometer device requires two post-fabrication processing steps that improve the fabrication device yield and for strategic design of the mechanical springs. The two steps include using Deep Reactive Ion-Etching (DRIE) to etch the bulk silicon for releasing the proof mass structure using oxide as masking layer and second, to pattern the multiple frame structures for multi-axis operation. The fabricated accelerometer device has an initial capacitance of approximately 1pF with a gap between inter-digitated comb fingers of 3μm. The device sensitivity is 50fF/g with a resolution of

Engineering,Materials Science,Physics