Abstract:MEMS (Micro Electromechanical System) sensors have been increasingly used to detect human movements in health monitoring applications. Usually, a full cycle of design and fabrication of a MEMS sensor such as an accelerometer requires highly professional understanding of device functions and expertise in microfabrication process. However, the advent of internet of things (IoT) brings a large demand for low-cost and highly customizable sensors, which requires fast fabrication and flexible design, even by the customers with limited background knowledge in the device itself. In this work, we present the development of a rapid design and fabrication workflow for accelerometers by combining an artificial neural network (ANN) based inverse design method and a one-step 3D printing fabrication technique. The one-step 3D printing fabrication approach is based on a conductive composite material, a polylactic acid (PLA) polymer with carbon black. In device design, trained bidirectional ANNs were designed to predict the device performance from given design parameters and retrieve the design parameters from the customer requirements of the device performance. A capacitive accelerometer was then designed based on the retrieved geometric parameters and fabricated by an integrated 3D printing process without using any additional metallization and assembly processes. With a sensitivity of 75.2 mV/g and a good dynamic response, the 3D printed accelerometer was shown to be capable of detection and monitoring of human movements. The proposed rapid design and fabrication workflow provides an effective solution to customized and low-cost MEMS devices suitable for IoT applications.

Design and Virtual Fabrication Process of a New Kind of Capacitive Accelerometer

Design and Fabrication Research on a Capacitive Accelerometer

Study of a Novel Micromachined Capacitive Accelerometer

An In-Plane Low-Noise Accelerometer Fabricated with an Improved Process Flow

Design of Force-Balance Capacitive Accelerometer

A Novel Tunable Lateral Sensing Capacitive Silicon Micromachined Accelerometer with High Sensitivity

The Design and Fabrication of A Miniaturized Differential-Capacitive Triaxial Accelerometer

A novel (111) single-crystal-silicon accelerometer using parallel-connected parallel plate capacitance

Design and Fabrication of a Micro-Electromechanical System Sandwich Capacitive Accelerometer

A Capacitive Micro-Accelerometer Based on LTCC Laminates

Design and Fabrication of A Torsional Z-Axis Capacitive Accelerometer with Novel Comb Capacitor

Laterally Capacity Sensed Accelerometer Fabricated with the Anodic Bonding and the High Aspect Ratio Etching

Design, Fabrication and Test of a Low Range Capacitive Accelerometer With Anti-Overload Characteristics

A novel capacitive accelerometer with an eight-beam-mass structure by self-stop anisotropic etching of (1 0 0) silicon

Design and Fabrication of a Mems Capacitive Accelerometer Based on Double-Device-layers SOI Wafer.

Design, Fabrication, And Performance Characterization Of Ltcc-Based Capacitive Accelerometers

A Rapid Design and Fabrication Method for a Capacitive Accelerometer Based on Machine Learning and 3D Printing Techniques

Silicon Micro-Accelerometer with Mg Resolution, High Linearity and Large Frequency Bandwidth Fabricated with Two Mask Bulk Process

A Fully Symmetrical Capacitive Accelerometer with Precisely Controllable Capacitor Gap

Modeling and Analysis of a SiC Microstructure-Based Capacitive Micro-Accelerometer

Design and Fabrication of a Highly Symmetrical Capacitive Triaxial Accelerometer