A Novel Tunable Lateral Sensing Capacitive Silicon Micromachined Accelerometer with High Sensitivity

SONG Fei,WANG Xin,WANG Yi-song,CHEN Jing

DOI: https://doi.org/10.3969/j.issn.1672-6030.2005.04.008

2005-01-01

Nanotechnology and Precision Engineering

Abstract:A novel lateral sensing capaoitive silicon accelerometer, having tunable stiffness by the electrostatic force, is proposed. The acceleration is measured by modifying the effective overlap area of a differential capacitor pair arid the linearity between output voltage and acceleration is ensured. To further improve the sensitivity, high K dielectric layer is introduced to increase the sensing capacitance. Mechanical analysis, mechanical-electrical coupled analysis and modal analysis are carried out with CoventorWare. The simulation results are matched very well with the theoretical prediction. It is a simple surface micromaching fabrication flow to set up the accelero-meter with a good future.