Synthesis and Fabrication of High‐Performance N‐type Silicon Nanowire Transistors

GF Zheng,W Lu,S Jin,CM Lieber
DOI: https://doi.org/10.1002/adma.200400472
IF: 29.4
2004-01-01
Advanced Materials
Abstract:Single crystal n-type silicon nanowires (SiNWs) with controlled phosphorus dopant concentrations have been successfully synthesized for the first time (see Figure). Field-effect transistor (FET) devices fabricated from these n-SiNWs exhibit good device properties, with mobilities more than 100 times greater than previous reports, and comparable to high-performance planar silicon FETs.
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