Non-linear characteristics of irradiation damages in silicon by MeV Si clusters

dingyu shen,dongxing jiang,xiting lu,yixiong shen,xuemei wang,zonghuang xia,qiang zhao,zhe zhang
DOI: https://doi.org/10.1016/S0169-4332(02)00615-3
IF: 6.7
2002-01-01
Applied Surface Science
Abstract:The irradiation damages produced in silicon crystal by 0.7 and 0.4MeV per atom Sin (n=1–3) were measured. The results of the measurement showed that the relationship between the defect concentrations and the cluster sizes is non-linear; and that the ratio of the defect concentration induced by clusters to that by single atoms increases with the decrease of the energy per atom for given-sized clusters. The experimental results can be well explained by the cooperation of the electronic and nuclear stopping processes.
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