Implantation Study of Silicon Cluster Ions Si+n(n=1-3)Into Si Crystal

赵子强
DOI: https://doi.org/10.3969/j.issn.1007-4627.2002.z1.030
2002-01-01
Abstract:In the case of Si + n (n=1-3) with energy of 0. 6 MeV/ion implantation into Si crystal, the mono-and bi-vacancies are formed i n the crystal. The optical absorption indicated that the defects, V 20 stat e, caused by cluster ions variy with the size of cluster. That is Effe ct. Cluster zone and effect can be deduced by TRIM program and the experiment of positive electron annihilation.
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