Measurement of SRAM Standby Leakage under Advanced Logic Process

CHEN Hao,DONG Qing,MA Ya-nan,LIN Yin-yin
DOI: https://doi.org/10.15943/j.cnki.fdxb-jns.2013.04.017
2013-01-01
Abstract:For 65 nm and beyond technology,SRAM design cares lower-power application more than ever.Since SRAM leakage consumes over half of total leakage power in standby mode,it's top priority to measure SRAM leakage current precisely for further leakage reduction technologies.A novel method for SRAM cell standby leakage measurement is proposed,which enables accurate testing and decoupling of substrate,gate and junction leakage currents in each SRAM cell transistor without any change of the front-end SRAM array layout to preserve actual physical environment.The corresponding test data under different temperatures for analysis is obtained via wafer mapping test.The systematic variation and local random variation of SRAM leakage current on whole wafer are also discussed.
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