Abstract:It is relatively easy to obtain highly oriented/textured Ba(ZrxTi1–x)O3 (BZT) films by magnetron sputtering, but it is complicated to control the composition of these sputtered oriented films. Here, a series of BZT ceramic targets with different ingredients (x = 0.05, 0.1, 0.15, 0.2, 0.25, and 0.3) and a BaTiO3 (x = 0) target were fabricated by solid-state sintering. Then, the corresponding BZT thin films were deposited on LaNiO3 (LNO) buffered Pt/Ti/(001)Si substrates adopting radio-frequency magnetron sputtering. Benefit from the prefabricated (001)-LNO buffer layer and optimized BZT film preparation process, all BZT films exhibit highly (00l) preferred orientation. However, the degree of orientation, lattice parameter, dielectric properties, ferroelectric behaviors, and energy-storage characteristics are all highly dependent on the Zr content of BZT films sputtered by targets with the same composition. (00l)-oriented BZT films with relatively low Zr content have a better crystalline structure [narrower full width at half maximum (FWHM), larger grains]. It is also found that the rising of the Zr content in (00l)-oriented BZT films will result in a larger out-of-plane lattice parameter, and these results indicate that the doping amount of Zr will strongly change the heterointerface stress/strain states and the growth mode of the oriented films, and then effectively tailor their electric performances.

(111)-Oriented Batio3 Thin Films Hydrothermally Formed On Tio2/Si Substrate

Hydrothermal BaTiO3 Thin Films on Ti‐Covered Silicon: Characterization and Growth Mechanism

Hydrothermal preparation of BaTiO3 thin film on silicon

Formation of BaTiO3 and PbTiO3 thin films under mild hydrothermal conditions

Effect of Sputtering-Target Composition on the Structure, Dielectric, Ferroelectric, and Energy Storage Properties of Highly (00L)-Oriented Ba(ZrxTi1–x)O3 Films

Low-temperature deposition of (110)-oriented barium titanate thin films and their electrical properties

In-situpreparation of Polycrystalline BaTiO3thin Films on Silicon by Hydrothermal Method

The oriented growth of PbTiO3 thin films deposited by a sol-gel process on substrates without lattice match

Orientation Preferred Structures in BaTiO3 Thin Films on Ni Substrates

Preparation of 〈100〉-Oriented Ba1-xSr xO3 films on Ni substrates by sol-gel method

Preferred Orientation Growth of Ba0.6Sr0.4TiO3 Thin Films with Epitaxial MgO Buffer Layer on Si(100) Substrate

Preparation and Study of Oriented TiO2 Thin Film

(001)-Oriented PbTiO3ferroelectric Thin Films Grown on Si by Metal-Organic Chemical Vapour Deposition

Manipulation of phase transitions and electrical properties of Ba<sub>1-x</sub>Sr<sub>x</sub>TiO<sub>3</sub> thin films through orientation engineering

Initial growth stages of titanium and barium oxide films on SrTiO3(001)

Preparation of A Monodispersed Suspension of Barium Titanate Nanoparticles and Electrophoretic Deposition of Thin Films

Oriented Zeolite Mfi Monolayer Films on Metal Substrates by in Situ Crystallization

A Facile Fabrication of Highly B-Oriented Mfi Zeolite Films in the Teos-Tpaoh-H2o System Without Additives

Hydrothermal growth of textured Ba(x)Sr(1-x)TiO3 films composed of nanowires

Preparation and Properties of Bi2ti2o7 Thin Films by Chemical Solution Deposition

Low-temperature synthesis of barium titanate thin films by nanoparticles electrophoretic deposition