Abstract:Barium strontium titanate (Ba0.6Sr0.4TiO3, BST) films have been deposited on Pt/Ti/SiO2/Si substrates by radio frequency magnetron sputtering. The influences of conventional thermal annealing (CTA) and rapid thermal annealing (RTA) on the chemical structures of the surface layers of the BST films have been investigated. Grazing x-ray diffraction and atomic force microscopy show that the RTA-films exhibit more compact structure and more completed crystallization than the CTA-films. X-ray photoelectron spectroscopy (XPS) investigations show that the surface layer is composed of a non-perovskited BST phase and a perovskited BST phase. For the CTA-film, the surface contains about 70% non-perovskited BST phase, and the surface layer is approximately 3-5 nm thick, while for the RTA-film, the surface non-perovskited BST phase amounts to about 40%, and the surface layer is about 1nm. XPS also indicates that the CTA-film surface adsorbs a larger amount of carbon contaminations than the RTA-film. Fourier transform infrared reveals that the amount of the surface adsorbed water and/or OH groups may be ignored. The non-perovskited BST phase is mainly related to the surface structure and the adsorbed carbon contaminations. The effect of annealing temperature on the surface layer and the amount of non-perovskited BST phase has been discussed, and the dielectric properties have also been measured.

Manipulation of phase transitions and electrical properties of Ba<sub>1-x</sub>Sr<sub>x</sub>TiO<sub>3</sub> thin films through orientation engineering

Manipulation of phase transitions and electrical properties of Ba1-Sr TiO3 thin films through orientation engineering

Effect of Crystal Orientation on the Phase Diagrams, Dielectric and Piezoelectric Properties of Epitaxial BaTiO3 Thin Films

Crystallographic Orientation Dependence of Dielectric Response in Lead Strontium Titanate Thin Films

Enhanced Piezoresponse and Dielectric Properties for Ba1-XSrXTiO3 Composition Ultrathin Films by the High-Throughput Method

Effects of anisotropic in-plane strains on the phase diagram of BaxSr1-xTiO3 thin film

Influence of Orientation on Dielectric and Ferroelectric Properties of the BNT-BT-ST Thin Films

Influence of the Vicinal Surface on the Anisotropic Dielectric Properties of Highly Epitaxial Ba0.7Sr0.3TiO3thin Films

Phenomenological theory of phase transitions in epitaxial BaxSr(1-x)TiO3 thin films

Microstructure and Enhanced In-Plane Ferroelectricity of Ba0.7sr0.3tio3 Thin Films Grown on Mgal2o4 (001) Single-Crystal Substrate

Orientation Dependence on Piezoelectric Properties of Bi0.5Na0.5TiO3-BaTiO3-SrTiO3 Epitaxial Thin Films

Orientation dependence of the dielectric and piezoelectric properties for the Ba 0.98 Ca 0.02 Ti 0.96 Sn 0.04 O 3 thin films

Structural, Dielectric, and Insulating Properties of Barium Strontium Titanate Thin Films Grown on Various Oriented Laalo3 Substrates

Microstructures and ferroelectric properties of Ba0.6Sr0.4TiO3 thin films

Microstructural and Morphological Evolutions in Compositionally-Graded (ba 1−x Sr X )tio 3 Thin Films and Related Dielectric Properties

Strain Phase Diagram and Physical Properties of (110)-Oriented PbTiO3 Thin Films by Phase-Field Simulations

Dielectric Properties and Microstructures of Ba 1−x Sr X TiO 3 Epitaxial Thin Films with Compositional Gradients Normal to the Substrates

Revisiting the Phase Transitions in Ba Sr1-TiO3 at Low Doping Range (X≤0.1)

Structure and Ferroelectric Properties of Barium Titanate Films Synthesized by Sol–gel Method

Tuning The Magnetic And Transport Properties Of La0.8ca0.2mno3 Films By Ba0.8sr0.2tio3 Intercalated Layers Grown With Polymer-Assisted Deposition

The influence of post-annealing on the chemical structures and dielectric properties of the surface layer of Ba<sub>0.6</sub>Sr<sub>0.4</sub>TiO<sub>3</sub> films