In-situpreparation of Polycrystalline BaTiO3thin Films on Silicon by Hydrothermal Method

WP Xu,LR Zheng,HP Xin,CG Lin,FM Jiang,QR Yin,M Okuyama
DOI: https://doi.org/10.1080/00150199708260519
1997-01-01
Ferroelectrics
Abstract:Abstract Insulating cubic BaTiO3(c-BT) polycrystalline thin films were synthesized on titanium covered silicon substrates using a novel low temperature technique called hydrothermal method. The films were hydrothermally formed by submerging the substrate in a 0.5M Ba(OH)2 aqueous solution sealed inside an autoclave, heating to 160°C with saturated vapor pressure around 0.8MPa and holding for various periods ranging from I to 9 hours. The surface of as-treated samples was dense, smooth pinhole-free with high homogeneity. Scanning electron microscopic (SEM) morphology showed the 6-hour-prepared films were composed of submicrocrystallines with grain size varied from 100 to 300nm in diameter. The films were characterized by X-ray diffraction (XRD), SEM, cross-sectional transmission electron microscopy (XTEM), Auger electron spectroscopy (AES) and Rutherford backscattering spectroscopy(RBS) analyses. The experimental results proved that hydrothermal method will become a valuable approach for fabricating perovs...
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