Hydrothermal preparation of BaTiO3 thin film on silicon

Wu Xu,Lianwei Wang,Huoping Xin,Lirong Zheng,Chenglu Lin
DOI: https://doi.org/10.1109/icsict.1995.500086
1995-01-01
Abstract:In situ crystallized BaTiO3 thin films have been successfully prepared on Ti-covered silicon substrates at low temperature of 160��C by hydrothermal method. The surface of the samples was dense, homogeneous and highly insulating, the films had good adherence to the substrate while exhibited dark-blue color. X-ray diffraction(XRD) characterization and spreading resistance probes(SRP) measurements showed that a multi-layer structure of cubic BaTiO3/amorphous BaTiO3-x/Ti/Si was formed, while it became tetragonal BaTiO3/Ti/Si after rapid thermal annealing (RTA) at 600��C for 60sec. Thus, it can be seen that hydrothermal method for preparing perovskite thin films will become an excellent low-temperature processing with great significance.
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