(001)-Oriented PbTiO3ferroelectric Thin Films Grown on Si by Metal-Organic Chemical Vapour Deposition

WH MA,MS ZHANG,L SHUN,YF CHEN,NB MING
DOI: https://doi.org/10.1088/0953-8984/7/47/023
1995-01-01
Journal of Physics Condensed Matter
Abstract:PbTiO3 ferroelectric thin films have been prepared on Si (001) by metal-organic chemical vapour deposition. The as-grown films were characterized by scanning electron microscopy, x-ray diffraction and Raman spectroscopy. It is shown that the films were highly (001) oriented and had essentially the same lattice constants as the bulk single crystal. However, the as-grown films were subject to internal stress as shown by a downshift in the Raman modes when compared with a bulk single crystal.
What problem does this paper attempt to address?