Abstract:Surfaces with controlled atomic step structures as substrates are highly relevant to desirable performances of materials grown on them, such as light emitting diode (LED) epitaxial layers, nanotubes and nanoribbons. However, very limited attention has been paid to the step formation in manufacturing process. In the present work, investigations have been conducted into this step formation mechanism on the sapphire c (0001) surface by using both experiments and simulations. The step evolutions at different stages in the polishing process were investigated with atomic force microscopy (AFM) and high resolution transmission electron microscopy (HRTEM). The simulation of idealized steps was constructed theoretically on the basis of experimental results. It was found that (1) the subtle atomic structures (e.g., steps with different sawteeth, as well as steps with straight and zigzag edges), (2) the periodicity and (3) the degree of order of the steps were all dependent on surface composition and miscut direction (step edge direction). A comparison between experimental results and idealized step models of different surface compositions has been made. It has been found that the structure on the polished surface was in accordance with some surface compositions (the model of single-atom steps: Al steps or O steps).

The image contrast of surface steps in reflection electron microscopy

Experimental studies of atomic step contrast in reflection electron microscopy (REM)

Diffraction Contrast in Reflection Electron Microscopy—ii. Surface Steps and Dislocations under the Surface

The Surface Step: Its Strain Field and REM Image Contrast Splitting

Surface Resonance Effects and Beam Convergence in Rem

Thermal diffuse scattering and REM image-contrast preservation

Fluorescence emission difference with defocused surface plasmon-coupled emission microscopy.

Diffraction contrast in reflection electron microscopy—I. Screw dislocation

Illumination of Crystal-Surfaces in the Electron-Microscope under Rheed and Rem Geometry

Imaging Surfaces with Reflected Electrons from A Field Emission Scanning Tunnelling Microscope: Image Contrast Mechanisms

The Importance Of The Surface Illumination In Rem

Interpretable and efficient contrast in scanning transmission electron microscopy with a diffraction grating beamsplitter

Atomic Steps on the Mgo(100) Surface

Effects of Surface Stress Relaxation on Reflection Electron Microscopy Images of Normal Emerging Edge Dislocations

Imaging Nanometer Phonon Softening at Crystal Surface Steps with 4D Ultrafast Electron Microscopy

Reflection electron imaging of free surfaces and surface/dislocation interactions

Atomic Step Formation on Sapphire Surface in Ultra-precision Manufacturing

Contrast-enhanced phase-resolved second harmonic generation microscopy

Geometric aspects of lattice contrast visibility in nanocrystalline materials using HAADF STEM

The observation of surface resonance effects in RHEED patterns

Three-Wave Resonance Grazing Incidence X-Ray Diffraction: A Novel Method for Direct Phase Determination of Surface In-Plane Reflections