Surface Resonance Effects and Beam Convergence in Rem

LM PENG,JM COWLEY
DOI: https://doi.org/10.1016/0304-3991(88)90388-9
IF: 2.994
1988-01-01
Ultramicroscopy
Abstract:Surface resonance effects and beam convergence have a strong influence on the reflection electron microscopy (REM) contrast of surface steps and defects. The effects resulting from the splitting of the reflection peaks, fine structures in the rocking curve around the Bragg angle and the azimuthal dependence of the reflection peak positions are discussed with reference to some experimental images of GaAs and Pt surfaces. Application of the concept of a resonance wave and the dependence of its spatial distribution on the diffraction conditions provides an explanation for the anomalous step contrast observed under the conditions when no strong Bragg reflections exist but the surface resonance effect is present.
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