Abstract:Digitized evaluation of micro sparse defects on large fine optical surfaces is one of the challenges in the field of optical manufacturing and inspection. The surface defects evaluation system (SDES) for large fine optical surfaces is developed based on our previously reported work. In this paper, the electromagnetic simulation model based on Finite-Difference Time-Domain (FDTD) for vector diffraction theory is firstly established to study the law of microscopic scattering dark-field imaging. Given the aberration in actual optical systems, point spread function (PSF) approximated by a Gaussian function is introduced in the extrapolation from the near field to the far field and the scatter intensity distribution in the image plane is deduced. Analysis shows that both diffraction-broadening imaging and geometrical imaging should be considered in precise size evaluation of defects. Thus, a novel inverse-recognition calibration method is put forward to avoid confusion caused by diffraction-broadening effect. The evaluation method is applied to quantitative evaluation of defects information. The evaluation results of samples of many materials by SDES are compared with those by OLYMPUS microscope to verify the micron-scale resolution and precision. The established system has been applied to inspect defects on large fine optical surfaces and can achieve defects inspection of surfaces as large as 850mm×500mm with the resolution of 0.5µm.

Reflection electron imaging of free surfaces and surface/dislocation interactions

Identification of Dislocations on Crystal Surfaces

Effects of Surface Stress Relaxation on Reflection Electron Microscopy Images of Normal Emerging Edge Dislocations

Diffraction contrast in reflection electron microscopy—I. Screw dislocation

Reflection Electron Microscopy Observations of Dislocations and Dislocation Motion in Zinc Oxide

Surface defects evaluation system based on electromagnetic model simulation and inverse-recognition calibration method

Illumination of Crystal-Surfaces in the Electron-Microscope under Rheed and Rem Geometry

Diffraction Contrast in Reflection Electron Microscopy—ii. Surface Steps and Dislocations under the Surface

Numerical simulation research and applications on scattering imaging of surface defects on optical components

Thermal diffuse scattering and REM image-contrast preservation

The Importance Of The Surface Illumination In Rem

Surface Resonance Effects and Beam Convergence in Rem

Reflection electron imaging of semiconductor multilayer materials

Application of reflection electron microscopy in cross-sectional study of multilayer semiconductor devices

A REM study of inhomogeneous stress fields induced by the interfacial steps at In0.2Ga0.8As/GaAs interface

Differential internal multi-reflection method for nano-displacement measurement

Multiple scattering simulation of electron channelling contrast images of dislocations at interfaces

Fundamental and experimental aspects of diffraction for characterizing dislocations by electron channeling contrast imaging in scanning electron microscope

Preface of 16th International Conference on Defects, Recognition, Imaging and Physics in Semiconductors

REM Observation of Electron-Beam-induced Reactions on GaAs(110) Surface

Fundamental Insights into the Mass Transfer Via Full Dislocation Loops Due to Alternative Surface Cuts