An Experimental Study of Chemical Vapour Deposition of Tungsten on Ti/TiN Adhesion Bilayers: Mechanical Properties

A Mouroux,SL Zhang,CS Petersson,R Palmans,K Maex,T Ahlgren,J Keinonen
DOI: https://doi.org/10.1016/s0257-8972(97)00567-7
IF: 4.865
1998-01-01
Surface and Coatings Technology
Abstract:The mechanical properties of chemical vapour deposited tungsten (W-CVD) on Ti/TiN adhesion bilayers have been studied. Rapid thermal annealing (RTA) of the Ti/TiN bilayers has been found to strongly affect subsequently deposited W films. The stress in W is reduced as a consequence of the RTA treatment of Ti/TiN, and the stress reduction is especially pronounced for thin W films. However, the stress in the Ti/TiN bilayers deposited at 300 or 550 °C increases substantially after the RTA treatment at 650 °C, leading to appreciable increase in the total stress of the whole Ti/TiN/W stack. The nucleation deposition of W on the annealed Ti/TiN is somewhat hindered. The retardation of W growth on annealed Ti/TiN is discussed in terms of thermodynamics and classical nucleation theory in conjunction with the reduction of the interfacial impurities (i.e. fluorine and oxygen) as a result of the RTA of Ti/TiN [A. Mouroux, R. Palmans, J. Keinonen, S.-L. Zhang, K. Maex, S. Petersson, in: Materials Research Society, MRS, San Francisco, CA, 1996], as well as the evolution of the W film texture with the W thickness.
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