Fabrication of Dodecagonal Pyramid on Nitrogen Face GaN and Its Effect on the Light Extraction

ShengLi Qi,ZhiZhong Chen,YongJian Sun,Hao Fang,YueBin Tao,LiWen Sang,PengFei Tian,JunJing Deng,LuBing Zhao,TongJun Yu,ZhiXin Qin,GuoYi Zhang
DOI: https://doi.org/10.1007/s11431-010-0067-7
2010-01-01
Science China Technological Sciences
Abstract:Wet etching has been widely used in defect evaluation for Ga-face GaN and surface roughness for N-face GaN dodecagonal pyramids has been fabricated on laser-lift-off N-face GaN by hot phosphor acid etching. The dodecagonal pyramid shows twelve facets including six {20-2-3} and six {22-4-5} planes. From cross-sectional TEM image, it is shown that the pyramid corresponds to the top of the edge dislocation. Compared with hexagonal pyramid-surface light emitting diodes (LEDs) etched by commonly used photoelectrochemical (PEC) process in KOH aqueous, the dodecagonal pyramid-surface LEDs show improved light extraction efficiency because of more facets, which effectively reduces the total internal reflection.
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