GaN Hexagonal Pyramids Formed by a Photo-Assisted Chemical Etching Method

Zhang Shi-Ying,Xiu Xiang-Qian,Hua Xue-Mei,Xie Zi-Li,Liu Bin,Chen Peng,Han Ping,Lu Hai,Zhang Rong,Zheng You-Dou
DOI: https://doi.org/10.1088/1674-1056/23/5/058101
2014-01-01
Chinese Physics B
Abstract:A series of experiments were conducted to systematically study the effects of etching conditions on GaN by a convenient photo-assisted chemical(PAC) etching method. The solution concentration has an evident influence on the surface morphology of GaN and the optimal solution concentrations for GaN hexagonal pyramids have been identified. GaN with hexagonal pyramids have higher crystal quality and tensile strain relaxation compared with as-grown GaN. A detailed analysis about evolution of the size, density and optical property of GaN hexagonal pyramids is described as a function of light intensity. The intensity of photoluminescence spectra of GaN etched with hexagonal pyramids significantly increases compared to that of as-grown GaN due to multiple scattering events, high quality GaN with pyramids and the Bragg effect.
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