Preparation and Characterization of GaN Micro/nano-Structures by the Electrodeless Photo-Assisted Chemical Etching

张士英,修向前,徐庆君,王恒远,华雪梅,谢自力,刘斌,陈鹏,韩平
DOI: https://doi.org/10.1360/sspma2015-00183
2015-01-01
Abstract:GaN micro/nano-structures of different morphology were successfully preparated by the electrodeless photo-assisted chemical etching in KOH solution, with K2S2O8 as the oxidizing agent. The structure, crystalline quality, stress state and optical property of both normal GaN and etched GaN were provided by the combined results of scanning electron microscopy (SEM) images, cathodoluminescence mapping (CL mapping), high-resolution X-ray diffraction (HRXRD) detection, micro-Raman spectra and photoluminescence (PL), respectively. The results show that pits, micro/ nanopillars and nanowires of high crystalline quality are formed in the high KOH concentrations (1 mol/L) and the low light intensity; GaN pyramid arrays have been fabricated in 0.4 mol/L KOH solution with high UV light intensity, and CL mapping indicates that these pyramids are composed of crystalline GaN surrounding a dislocation; Whiskers can also be obtained in 0.1 mol/L KOH with high UV light intensity after etching. The whiskers are believed to be directly correlated with line-type defects of edge and mixed character. The formation mechanism and the feature of GaN different morphology were rationally explained. And the etching temperature and the polarity of GaN surface have an evident influence on the surface morphology of GaN.
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