Visible Luminescence from Controlled Multi-Layer Stack Comprising of Thin Amorphous Silicon and Silicon Nitride Layers

w k tan,m b yu,q chen,j d ye,g q lo,d l kvvong
DOI: https://doi.org/10.1109/GROUP4.2007.4347676
2007-01-01
Abstract:We report photoluminescence (PL) and electroluminescence (EL) from multi-layer α-silicon/Si <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> N <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</sub> . Peak PL is tunable within the red region by varying α-Si thickness. EL result is also reported. This structure benefits from a low-thermal-budget process (≤700°C).
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