Using 12 MeV electron beams to develop silicon P+NN+ high frequency rectifying diodes

Hang Desheng,Lai Qiji,Shi Yi,Zheng Zheng
DOI: https://doi.org/10.1016/S0168-583X(00)00315-3
2000-01-01
Abstract:Twelve MeV electron beams were used to irradiate common P+NN+ diodes (1 A and 1 kV) in order to transfer them into high frequency rectifying ones. Some interesting results have been obtained. It seems that this method is superior to the traditional gold-doping technique in controlling precisely the lives of the minority carriers. Compared with the later electron beam irradiation made the reverse recovery time (t(rr)) and FWD-voltage (V-F) Of the diodes better consistent and repeatable. The high temperature performance was also obviously improved. The qualified rate of diodes was enhanced by more than 30%. (C) 2000 Elsevier Science B.V. All rights reserved.
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