Improved Lifetime for Kilovolts Class Avalanche GaAs PCSS by Surface Passivation of Composite Dielectric Films
Yingxiang Yang,Long Hu,Xianghong Yang,Zhangjie Zhu,Jia Huang,Mingchao Yang,Xin Li,Li Ni,Yang Zhou,Li Geng
DOI: https://doi.org/10.1109/tdei.2024.3465456
IF: 2.509
2024-01-01
IEEE Transactions on Dielectrics and Electrical Insulation
Abstract:Avalanche Gallium arsenide photoconductive semiconductor switchs (GaAs PCSS) are essential solid-state semiconductor devices for realizing compact and repetitive-frequency pulsed power sources. However, the lifetime and reliability of avalanche GaAs PCSS face serious challenges due to ultra-high density current filaments and electric field concentration in the electrode region. Here, an Aluminium nitride / Silicon nitride (AlN/Si 3 N 4 ) composite dielectric films is proposed dedicated to improve the lifetime of GaAs PCSS. The critical breakdown electric field strength, leakage current and chemical element composition of the AlN/Si 3 N 4 films are characterized. Meanwhile, the mechanism of leakage current of dielectric films is analyzed using Poole-Frenkel (P-F) emission and Trap-Assisted Tunneling (TAT) mechanisms. Compared with the Si 3 N 4 -GaAs PCSS, the AlN/Si 3 N 4 -GaAs PCSS has 52.8% lower dark-state current, 10% higher current amplitude, and 7.3% higher lifetime at 40 kV bias voltage. Finally, the damage mechanism of GaAs PCSS was explored.