Research on Total Dose Effect of Double Polysilicon Self-Aligned NPN Transistors

Jincheng JIA,Wu LU,Xue WU,Peijian ZHANG,Jing SUN,Xin WANG,Xiaolong LI,Mohan LIU,Qi GUO,Yuan LIU
DOI: https://doi.org/10.13911/j.cnki.1004-3365.170142
2018-01-01
Abstract:The effects of high and low-dose-rate irradiation from 60Co-γ source on double polysilicon self-aligned (DPSA) NPN transistors fabricated by domestic advanced complementary bipolar process were investigated.In this experiment,the shift test method was used before and after irradiation at room temperature annealing.The variation law of base current,collector current and current gain of transistors was mainly studied.The results showed that the tolerance to total irradiation dose on NPN transistors with double polysilicon self-aligned technique was superior to that of the NPN transistors with traditional processing.But the irradiation hardened ability to resist the low rate dose irradiation (known as enhanced low dose rate sensitivity (ELDRS)) was not improved.Finally,the irradiation damage mechanisms of DPSA NPN transistors were investigated,and the intrinsic mechanisms of resisting the bipolar transistor's ELDRS effects had also been discussed.
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