Application of Sputtering-Based Laminating Selenylation Process to Preparation of CIGS Thin Films

焦飞,廖成,周震,韩俊峰,谢华木,赵夔
IF: 4
2008-01-01
Vacuum
Abstract:A sputtering-based laminating selenylation process was developed and applied to the preparation especially the commercial production of large-area CIGS thin films, ie., the Cu(In,Ga)Se2 films. SEM and EDX were used to analyze the microsturcture and composition distribution of the CIGS films prepared by the process developed. The results revealed that the film microstructure can be improved greatly if increasing the substrate temperature and controlling the temperature of Se source to increase Se content in precursor layers. After deposited, the CIGS thin films were reannealed so as to improve further their microstructure and, what's more, to control efficiently the Ga distribution along the film thickness.
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