PROCESS AND PERFORMANCE OF CHALCOPYRITE CIGSe ABSORBERS FABRICATED BY MAGNETRON SPUTTERING

Hexin Luan,Daming Zhuang,Gong Zhang,Jiang Liu
DOI: https://doi.org/10.3969/j.issn.0254-0096.2013.04.012
2013-01-01
Abstract:CuInxGa1-xSe2 thin films have been deposited by magnetron sputtering from a CIGSe target. SEM, XRD, Raman, XRF, Hall were used to observe and analyze the compositions, microstructures, surface morphologies and electrical properties of the films. The results showed the crystalline quality of CIGSe thin films could be improved by increasing substrate temperature especially at substrates temperatures higher than 250°C. It was found that the ideal electrical resistivity and carrier concentration of the films could be obtained when substrates temperatures were between 250°C to 300°C. When sputtering pressure was increased, the sputtering rate and the electrical resistivity were lower and the carrier concentration was higher. When sputtering pressure was 0.7 Pa, films with the ideal electrical resistivity and carrier concentration could be obtained. Substrate temperatures and sputtering pressures have no effects on composition of films, which is determined by the composition of CIGSe target.
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