Investigation of Sub-10-nm Diameter, Gate-All-Around Nanowire Field-Effect Transistors for Electrostatic Discharge Applications

W. Liu,J. J. Liou,Y. Jiang,N. Singh,G. Q. Lo,J. Chung,Y. H. Jeong
DOI: https://doi.org/10.1109/tnano.2009.2038225
2010-01-01
IEEE Transactions on Nanotechnology
Abstract:Electrostatic discharge (ESD) robustness of a promising nanoscaled device, the gate-all-around nanowire field-effect transistor (NW FET), was characterized for the first time using the transmission-line pulsing technique. The effects of gate length, nanowire dimension, and nanowire count on the failure current, leakage current, trigger voltage, and on-resistance were investigated. ESD performances of the gate-all-around NW FET and other nanostructure devices, such as the poly-Si nanowire thin-film transistor and FinFET were also compared and discussed.
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