Reduction of MOS interfacial states between β -Ga 2 O 3 and Al 2 O 3 insulator by self-reaction etching with Ga flux
Boyuan Feng,Tao He,Gaohang He,Xiaodong Zhang,Ying Wu,Xiao Chen,Zhengcheng Li,Xinping Zhang,Zhitai Jia,Gang Niu,Qixin Guo,Zhongming Zeng,Sunan Ding
DOI: https://doi.org/10.1063/5.0048311
IF: 4
2021-05-03
Applied Physics Letters
Abstract:In this Letter, self-reaction etching (SRE) with Ga flux demonstrates the capability of eliminating surface contaminations and damage, as well as improving the electrical characteristics of the interface between monoclinic gallium oxide (β-Ga<sub>2</sub>O<sub>3</sub>) and the insulator. Compared to post-tetramethyl ammonium hydroxide wet chemical treatment, SRE is a low damage repair method that effectively removes surface contaminants introduced during previous inductively coupled plasma etching of β-Ga<sub>2</sub>O<sub>3</sub> without surface damage. As a consequence, the surface band bending on the β-Ga<sub>2</sub>O<sub>3</sub> surface decreased as demonstrated by the core-level peak shifts of x-ray photoemission spectroscopy, which indicated fewer negative charges remained on the surface. Furthermore, the interface state density (<i>D<sub>it</sub></i>) between β-Ga<sub>2</sub>O<sub>3</sub> and an Al<sub>2</sub>O<sub>3</sub> insulator was determined by using high-temperature conductance and photoassisted C–V measurements. The <i>D<sub>it</sub></i> dropped significantly for samples treated by SRE as compared with other treatments. These results suggested that SRE is an attractive etching candidate for future Ga<sub>2</sub>O<sub>3</sub> power device fabrication.
physics, applied