An improved method to remove anti-footing Al layer after DRIE

Yuan Li, Zhenchuan Yang, Guizhen Yan
DOI: https://doi.org/10.1109/NEMS.2009.5068712
2009-01-01
Abstract:The SGADER (Silicon Glass Anodic-bonding and Deep Etching Release) technology is a well-developed platform for many MEMS devices. An anti-footing aluminum film is a low cost but effective approach to minimize the footing effect in SGADER process, but such Al film cannot be removed completely with normal Al wet etchant after DRIE. In this paper, an optimized etching process for cleaning the anti-footing Al was developed and tested. The experimental results show that the newly developed etching process can improve the efficiency of the Al removing process.
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