Abstract:Micro-electromechanical System(MEMS) accelerometers are widely used in a number of inertial navigation systems and vibration detection system thanks to their small size, low cost and low power consumption. In order to improve their performance, the accelerometers have been designed to compensate the zero-bias caused by process variations. A new method of self-calibration sensitivity applies a self-test structure to simulate standard acceleration; depending on the standard and real-time values of the accelerometer's output and by adjustment of the time division feedback, the scale factor of capacitive accelerometers can be flexibly adjusted to achieve sensitivity in self-calibrating MEMS accelerometers. Moreover, this research also uses the following: a PID feedback structure to improve the stability of the closed-loop system; a correlated double sampling (CDS) circuit to attenuate noise, which can eliminate zero drift caused by offset voltage of the pre-amplifier; a time division multiplexing electrostatic force feedback circuit to achieve the operation of a closed-loop micro-accelerometer. The structure can completely avoid electrostatic feedback coupling with a capacitance change detection circuit, which can also improve the bandwidth and stability of the accelerometer. By means of capacitance compensation array the zero-bias performance of accelerometers can be improved. The bias stability of the accelerometer can be reduced from 173mg to 31mg by testing. (C) 2015 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution 3.0 Unported License.

Analysis of the self-test characteristics of a micromachined accelerometer

Self-Test Characteristics of a Micromachined Accelerometer

A Hybrid Micro-Accelerometer System with CMOS Readout Circuit and Self-Test Function

Study of a Novel Micromachined Capacitive Accelerometer

An In-Plane Low-Noise Accelerometer Fabricated with an Improved Process Flow

Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based on Michelson Interferometer Structure

A Novel Self-Test Structure for Time-Divided Closed-Loop MEMS Capacitive Accelerometer

Design Of Readout Circuits Used For Micro-Machined Capacitive Accelerometer

Studies on Self-Testable/Self-Calibratable Capacitive Microaccelerometer with Metal Structure and High Load Capacity

Design for Electrostatically Levitated Micromechanical Accelerometer

Study on Structure and Detecting Technique of Micro-accelerometer

Structural Design and Testing of a Micromechanical Resonant Accelerometer

Verilog-A modeling and design of a micromachined capacitive accelerometer

Electrometric Method for Measuring the Mechanical Parameters of a Comb-Finger Micro-Mechanical Accelerometer

A Novel Tunable Lateral Sensing Capacitive Silicon Micromachined Accelerometer with High Sensitivity

Study of self-calibrating MEMS accelerometers

Design and Realization of Comb-Finger Micromechanical Accelerometer

Design and Simulation of A Multi-Finger Micromechanical Silicon Accelerometer

Micromachined Tri-Axis Capacitive Accelerometer Based on the Single Mass

A micromachined resonant accelerometer

A Pendulous Micromachined Silicon Accelerometer