Abstract:In this research, a high-efficiency design method of the capacitive MEMS accelerometer is proposed. As the MEMS accelerometer has high precision and a compact structure, much research has been carried out, which mainly focused on the structural design and materials selection. To overcome the inconvenience and inaccuracy of the traditional design method, an orthogonal design and the particle swarm optimization (PSO) algorithm are introduced to improve the design efficiency. The whole process includes a finite element method (FEM) simulation, high-efficiency design, and verification. Through the theoretical analysis, the working mechanism of capacitive MEMS accelerometer is clear. Based on the comparison among the sweep calculation results of these parameters in the FEM software, four representative structural parameters are selected for further study, and they are le, nf, lf and wPM, respectively. le and lf are the length of the sensing electrode and fixed electrode on the right. nf is the number of electrode pairs, and wPM is the width of the mass block. Then, in order to reduce computation, an orthogonal design is adopted and finally, 81 experimental groups are produced. Sensitivity SV and mass Ma are defined as evaluation parameters, and structural parameters of experimental groups are imported into the FEM software to obtain the corresponding calculation results. These simulation data are imported into neural networks with the PSO algorithm. For a comprehensively accurate examination, three cases are used to verify our design method, and every case endows the performance parameters with different weights and expected values. The corresponding structural parameters of each case are given out after 24 iterations. Finally, the maximum calculation errors of SV and Ma are 1.2941% and 0.1335%, respectively, proving the feasibility of the high-efficiency design method.

Electrometric Method for Measuring the Mechanical Parameters of a Comb-Finger Micro-Mechanical Accelerometer

An electrometric method to measure the mechanical parameters of MEMS devices

Design of Force-Balance Capacitive Accelerometer

Design and Realization of Comb-Finger Micromechanical Accelerometer

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

A Stiffness-Tunable MEMS Accelerometer

Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based on Michelson Interferometer Structure

Study on the Mech Anical Stiffness of the Flexible Beams in a Micro-Machined Accelerometer

Analysis and Optimization on Dynamic Characteristics and Important Parameters of Force Feedback Accelerometer

Design for Electrostatically Levitated Micromechanical Accelerometer

Structural Design and Testing of a Micromechanical Resonant Accelerometer

Design and Simulation of A Multi-Finger Micromechanical Silicon Accelerometer

The High-Efficiency Design Method for Capacitive MEMS Accelerometer

Simplified Method of Microcontact Force Measurement by Using Micropressure Sensor

Identification and adjustment of the position and attitude for the electrostatic accelerometer's proof mass

Design and realization of testing instrument applied to MEMS accelerometer sensor

A New Method to Measure Adhesion and Surface Forces Using A Closed-Loop Accelerometer

Measuring Principle and Dynamic Characteristics Design for An Electro-Statically Suspended Accelerometer with Differential-Capacitance

A micromachined resonant accelerometer

A Method of Precise Auto-Calibration in a Micro-Electro-Mechanical System Accelerometer

Design and Analysis of a Multi-Finger Micromechanical Silicon Accelerometer