Measuring Principle and Dynamic Characteristics Design for An Electro-Statically Suspended Accelerometer with Differential-Capacitance

Liang ZHANG,Qiu-hai LU
DOI: https://doi.org/10.3969/j.issn.1000-3835.2008.09.019
2008-01-01
Abstract:Recently, accelerometers are extensively used in fields of inertia navigation and earth exploration. In field of deep-space exploration, such as, detecting gravity field, new types of accelerometers with smaller measaring range and higher resolution are required. Electro-statically suspended accelerometer with differential-capacitance is one of these types. This kind of accelerometer functions like a classical mass-spring system. In order to effectively design this accelerometer, it is necessary to study how the system characteristics are influenced by parameters of proof mass, servo-controlled feedback electrostatic force and air damping. This paper firstly introduces the configuration and the function of this accelerometer. The accelerometer and a mass-spring system are compared theoretically. Taking the mass-spring system as a prototype, a dynamic model of the accelerometer is set up. The dynamic characteristics of this model are studied, including its vibration equation, natural frequency, damping, impulse response and step response. Besides, the influence of the parameters of the mechanical configuration and the servocontrol electric circuits on the dynamic characteristics is also discussed. As this accelerometer is aiming to detect gravity gradient signal with low frequency in space, its response to lower frequency excitation is of special interests in here.
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