Study on the Mech Anical Stiffness of the Flexible Beams in a Micro-Machined Accelerometer

李疆,高钟毓,董景新
DOI: https://doi.org/10.3969/j.issn.1000-9787.2003.09.027
2003-01-01
Abstract:When using open loop frequency response experiment to derive the mechanical stiffness of the flexible beam in a micro-machined accelerometer,the result is affected inevitably by negative electrostatic spring stiffness.After analyzed the effect of preload voltage and sweep voltage on the negative electrostatic spring stiffness,a method to dissociate mechanical stiffness from the system stiffness has been provided.The results of experiments under different conditions show that the actual value of the mechanical stiffness can be estimated with a high accuracy by this method.
What problem does this paper attempt to address?