Abstract:With the utilization of photomasks, micro/nanoscale wells and channels with depths ranging from nanometers to several micrometers were fabricated on a poly(ethylene terephthalate) (PET) surface by a simple combination of photochemical and alkaline hydrolysis etching. The PET surface region could be directly and photochemically etched by UV light and N,N-dimethylformamide (DMF) to create 125-350 nm etching depths (step 1). In step 2, the depth could be further enlarged to 250-1400 nm by potassium hydroxide (KOH) developing. More importantly, when this combination etching was repeated with the same photomask, the depth increased with increasing etching times. For instance, the depth reached approximately 6 mu m after a series of three combination etchings. The cross-sectional shape of the final structure was trapezoidal with smooth corners. No obvious widening effect in lateral size was observed after one combination etching, whereas the top width of the microfabricated channels was enlarged from 50 mu m (the designed feature of the photomask used) to 100 mu m after two or three combination etchings. Even more interesting was that step 1 resulted in the formation of a kind of aminated surface in the channel (6.5% amine content), but when step 2 was conducted, the aminated surface was erased. This process could be reversibly carried out by repeating step 1 (amination) and step 2 (erasing). Electrostatical self-assembly of an antibody, fluorescein isothiocyanate-labeled immunoglobulin G (FITC-IgG, goat anti-rabbit), was achieved on the aminated surface of the etched channels, which demonstrated that by this combination strategy, micro/nanoscale channels or wells featuring tunable depths and functional channel surfaces could be readily fabricated. Undoubtedly, these functionalized channels or wells onto organic substrates could provide a potential platform for microchips toward various functions such as microarrays, heterogeneous immunoassays, biosensors, concentrations, filtrations, and microanalysis.

Fabrication of High Aspect Ratio Nano-Channels by Thermal Nano-Imprinting and Parylene Deposition

Simple and Cost-Effective Fabrication of Two-Dimensional Plastic Nanochannels from Silica Nanowire Templates

Wafer-scale Fabrication of High-Aspect Ratio Nanochannels Based on Edge-Lithography Technique.

Fabrication of Size-Controllable Nanofluidic Channels Using Angled Physical Vapor Deposition

Fabrication of Enclosed Nanofluidic Channels by UV Cured Imprinting and Optimized Thermal Bonding of SU-8 Photoresist

The Fabrication of High-Aspect-ratio, Size-Tunable Nanopore Arrays by Modified Nanosphere Lithography.

Fabrication of Size Controllable SU-8 Nanochannels Using Nanoimprint Lithography and Low-Pressure Thermal Bonding Methods

Channel resolution enhancement through scalability of nano/micro-scale thickness and width of SU-8 polymer based optical channels using UV lithography

Fabrication of 1-d nanochannels on PMMA substrate by photoresist-free uv lithography and UV-assisted bonding under low temperature

Fabrication of sub-50 nm nanochannel array by an angle forming lift-off method

Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding

Fabrication of SU-8 Photoresist Micro–nanofluidic Chips by Thermal Imprinting and Thermal Bonding

Fabrication of Fluidic Chips with 1-D Nanochannels on PMMA Substrates by Photoresist-Free UV-lithography and UV-assisted Low-Temperature Bonding

Micro/nanoscale well and channel fabrication on organic polymer substrates via a combination of photochemical and alkaline hydrolysis etchings.

Advanced Conformal Parylene Fabrication for Micro/nano Devices

A Study on the Fabrication of Nanostructures with High Aspect Ratio and Large Area Uniformity

Fabrication of SU-8 Nanofluidic Channels by Reverse Thermal Bonding under Mild Conditions

A novel fabrication method of embedded micro-channels by using SU-8 thick-film photoresists

Nanoimprinting and backside ultraviolet lithography for fabricating metal nanostructures with higher aspect ratio

A Low-Cost Method of Fabricating Hybrid Micro-Nano Fluidic Chip by Double-Layer PDMS Mold and UV–thermal Nanoimprinting

A new low-cost fabrication method of SU-8 micro–nano channels and needle tip in electro-hydrodynamic jet chips