Atomic-Scale Scanning of Domain Network in the Ferroelectric HfO 2 Thin Film

Kunwoo Park,Dongmin Kim,Kyoungjun Lee,Hyun-Jae Lee,Jihoon Kim,Sungsu Kang,Alex Lin,Alexander J. Pattison,Wolfgang Theis,Chang Hoon Kim,Hyesung Choi,Jung Woo Cho,Peter Ercius,Jun Hee Lee,Seung Chul Chae,Jungwon Park
DOI: https://doi.org/10.1021/acsnano.4c08721
IF: 17.1
2024-09-13
ACS Nano
Abstract:Ferroelectric HfO(2)-based thin films have attracted much interest in the utilization of ferroelectricity at the nanoscale for next-generation electronic devices. However, the structural origin and stabilization mechanism of the ferroelectric phase are not understood because the film is typically nanocrystalline with active yet stochastic ferroelectric domains. Here, electron microscopy is used to map the in-plane domain network structures of epitaxially grown ferroelectric Y:HfO(2) films in...
materials science, multidisciplinary,chemistry, physical,nanoscience & nanotechnology
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