Abstract:Laterally excited bulk acoustic resonators (XBARs) are plate mode resonators in which one of the higher-order plate modes transforms into the bulk acoustic wave (BAW) due to the very thin plates used in these devices. The propagation of the primary mode is usually accompanied by numerous spurious modes, which deteriorate resonator performances and restrict potential XBARs' applications. This article suggests a combination of different methods for insight into the nature of the spurious modes and their suppression. Analysis of the BAW slowness surface provides optimization of XBARs for single-mode performance in the filter passband and around it. The rigorous simulation of admittance functions in the optimal structures allows for further optimization of electrode thickness and duty factor. Finally, the nature of different plate modes generated in a wide frequency range is clarified via simulation of dispersion curves, which characterize acoustic mode propagation in a thin plate under the periodic metal grating, and visualization of displacements accompanying wave propagation. Application of this analysis to lithium niobate (LN)-based XBARs demonstrated that in LN cuts with Euler angles (0°, 4°-15°, 90°) and plate thickness dependent on orientation and varying between 0.05 and 0.1 wavelengths, the spurious-free response could be achieved. Due to tangential velocities of 18-37 km/s combined with the coupling of 15%-17% and feasible duty factor a/p = 0.5, the found XBAR structures can be applied in high-performance 3-6 GHz filters.

Design and Fabrication of Lithium Niobate Asymmetrical Mode Resonators toward C-band and Ku-band

Design and Analysis of Lithium-Niobate-Based Laterally Excited Bulk Acoustic Wave Resonator with Pentagon Spiral Electrodes.

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Suppression of spurious modes in lateral-excited bulk acoustic wave resonators using piston mode electrodes

High Electromechanical Coupling Factor Lamb Wave Resonator

Solidly Mounted Longitudinally Excited Shear Wave Resonator (YBAR) Based on Lithium Niobate Thin-Film

High Figure-of-Merit A1-Mode Lamb Wave Resonators Operating Around 6 GHz Based on the LiNbO3 Thin Film

Study of High-Q Laterally Excited Bulk Wave Resonator with Smaller Gap-width Reflectors

LITHIUM NIOBATE THIN FILM BASED A1 MODE RESONATORS WITH FREQUENCY UP TO 16 GHZ AND ELECTROMECHANICAL COUPLING FACTOR NEAR 35%

Laterally Excited Resonators Based on Single-Crystalline LiTaO3 Thin Film for High-Frequency Applications

Spurious Modes in Laterally Excited Bulk Acoustic Resonators (XBARs): Analysis and Suppression

Toward Ka Band Acoustics: Lithium Niobate Asymmetrical Mode Piezoelectric MEMS Resonators

Transverse Mode Suppression of Thickness Shear Bulk Acoustic Resonators on Lithium Niobate Using Standard and Broadband Piston Mode Designs

C-Band Lithium Niobate on Silicon Carbide SAW Resonator With Figure-of-Merit of 124 at 6.5 GHz

2-16 GHz Multifrequency X-Cut Lithium Niobate NEMS Resonators on a Single Chip

High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure

A laterally excited bulk acoustic resonator with scattering vias in electrodes

6 GHz Lithium Niobate MEMS Resonator with Square Spiral Electrodes

Ultra flexible pseudo-lamb wave RF resonators based on ZnO/PI and AlN/PI structures

High-quality-factor Optical Microresonators Fabricated on Lithium Niobate Thin Film with an Electro-Optical Tuning Range Spanning over One Free Spectral Range [Invited]

Double-layer Thin-film LiNbO3 Longitudinally Excited Shear Wave Resonators with Ultra-large Electromechanical Coupling Coefficient and Spurious-Free Performance