Abstract:Laterally excited bulk acoustic resonators (XBARs) are plate mode resonators in which one of the higher-order plate modes transforms into the bulk acoustic wave (BAW) due to the very thin plates used in these devices. The propagation of the primary mode is usually accompanied by numerous spurious modes, which deteriorate resonator performances and restrict potential XBARs' applications. This article suggests a combination of different methods for insight into the nature of the spurious modes and their suppression. Analysis of the BAW slowness surface provides optimization of XBARs for single-mode performance in the filter passband and around it. The rigorous simulation of admittance functions in the optimal structures allows for further optimization of electrode thickness and duty factor. Finally, the nature of different plate modes generated in a wide frequency range is clarified via simulation of dispersion curves, which characterize acoustic mode propagation in a thin plate under the periodic metal grating, and visualization of displacements accompanying wave propagation. Application of this analysis to lithium niobate (LN)-based XBARs demonstrated that in LN cuts with Euler angles (0°, 4°-15°, 90°) and plate thickness dependent on orientation and varying between 0.05 and 0.1 wavelengths, the spurious-free response could be achieved. Due to tangential velocities of 18-37 km/s combined with the coupling of 15%-17% and feasible duty factor a/p = 0.5, the found XBAR structures can be applied in high-performance 3-6 GHz filters.

Design and Analysis of Lithium-Niobate-Based Laterally Excited Bulk Acoustic Wave Resonator with Pentagon Spiral Electrodes.

Design and Fabrication of Lithium Niobate Asymmetrical Mode Resonators toward C-band and Ku-band

6 GHz Lithium Niobate MEMS Resonator with Square Spiral Electrodes

Spurious Modes in Laterally Excited Bulk Acoustic Resonators (XBARs): Analysis and Suppression

Solidly Mounted Longitudinally Excited Shear Wave Resonator (YBAR) Based on Lithium Niobate Thin-Film

Double-layer Thin-film LiNbO3 Longitudinally Excited Shear Wave Resonators with Ultra-large Electromechanical Coupling Coefficient and Spurious-Free Performance

High speed surface acoustic wave and laterally excited bulk wave resonator based on single-crystal non-polar AlN film

Lithium Niobate MEMS Antisymmetric Lamb Wave Resonators with Support Structures

LITHIUM NIOBATE THIN FILM BASED A1 MODE RESONATORS WITH FREQUENCY UP TO 16 GHZ AND ELECTROMECHANICAL COUPLING FACTOR NEAR 35%

High Figure-of-Merit A1-Mode Lamb Wave Resonators Operating Around 6 GHz Based on the LiNbO3 Thin Film

A near spurious-free 6 GHz LLSAW resonator with large electromechanical coupling on X-cut LiNbO3/SiC bilayer substrate

Laterally Excited Resonators Based on Single-Crystalline LiTaO3 Thin Film for High-Frequency Applications

High Electromechanical Coupling Factor Lamb Wave Resonator

Suppression of spurious modes in lateral-excited bulk acoustic wave resonators using piston mode electrodes

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Ultra flexible pseudo-lamb wave RF resonators based on ZnO/PI and AlN/PI structures

Properties Study of LiNbO 3 Lateral Field Excited Device Working on Thickness Extension Mode

Lateral-field-excitation Properties of LiNbO 3 Single Crystal

High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure

Optimization of Surface Acoustic Wave Resonators on 42°Y-X LiTaO3/SiO2/Poly-Si/Si Substrate for Improved Performance and Transverse Mode Suppression

Ring-shaped Lamb Wave Resonator Based LiNbO3 Film with A1/A3 Mode Resonance above 6/17 GHz