Lateral-field-excitation Properties of LiNbO 3 Single Crystal

Wang Wen-Yan,Zhang Chao,Zhang Zhi-Tian,Liu Yan,Feng Guan-Ping
DOI: https://doi.org/10.1088/1674-1056/18/2/064
2009-01-01
Abstract:LiNbO3 has been found attractive for lateral field excitation (LFE) applications due to its high piezoelectric coupling. In this paper, bulk acoustic wave propagation properties for LiNbO3 single crystal excited by a lateral electirc field have been investigated using the extended Christoffel-Bechmann method. It is found that the LFE piezoelectric coupling factor of c mode reaches its maximum value of 95.46% when psi - 0 degrees for both (yxl)-58 degrees and (yxwl)+/- 60 degrees/58 degrees LiNbO3. The acoustic wave phase velocity of c mode TSM (thickness shear mode) changes from 3456 m/s to 3983 m/s as a function of psi. Here psi represents the angle between the lateral electric field and the crystallographic X-axis in the substrate major surface. A 5 MHz LFE device of (yxl)-58 degrees LiNbO3 with psi = 0 degrees was designed and tested in air. A major resonance peak was observed with the motional resistance as low as 17 Omega and the Q-factor value up to 10353. The test result is well in agreement with the theoretical analysis, and suggests that the LFE LiNbO3 device can be a good platform for high performance resonator or sensor applications.
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