Lateral-field-excitation piezoelectric sensors for liquid sensing

WANG Wenyan,ZHANG Chao,ZHANG Zhitian,LIU Yan,FENG Guanping,JING Gang

DOI: https://doi.org/10.3321/j.issn:1000-0054.2009.02.015

2009-01-01

Abstract:Piezoelectric sensors based on lateral field excitation(LFE) offer more superior capabilities than traditional quartz crystal microbalance sensors.Micro acoustic wave theory was used to analyze the propagation mechanism of LFE bulk acoustic waves and to calculate the piezoelectric coupling factors for arbitrary cut orientations and lateral field directions in quartz.An LFE sensor was then designed and tested in three different liquid solutions to measure the sensitivities to liquid viscosity,permittivity,and conductivity.The results show that LFE sensors offer much higher sensitivity to liquid electrical property changes in addition to a mass sensitive effect.This behavior could be used to design a biosensor sensitive to several properties.