Performance Analysis of Pure-lateral-field-excitation Piezoelectric Sensors with Different Electrode Configuration

ZHANG Zhi-tian,ZHANG Chao,WANG Wen-yan,MA Ting-feng,FENG Guan-ping

DOI: https://doi.org/10.3969/j.issn.1002-1841.2009.z1.008

2009-01-01

Abstract:Lateral-field-excitation(LFE) sensors have been widely investigated due to their superior performance in liquid sensing applications.Recent studies show that LFE sensors have three different kind of working modes,pure-LFE,quasi-LFE,and pseudo-LFE mode.In order to study the characteristics of pure-LFE piezoelectric sensors,several 4.5 MHz LFE devices with different electrode configurations were fabricated and tested.Devices with the two-turn symmetric spiral electrode and the single-gap electrode offer higher Q value than other devices.When the sensing surface of these devices were tested from air to water and from water to NaCl water solution respectively,their resonant frequencies decreased.However,when they were moved from water to isopropanol water solution,the resonant frequencies increased.The device with the dual-gap electrode shows the maximum frequency change compared to other devices.