Single-Crystalline LiTaO 3 Film-Based High-Frequency Surface Acoustic Wave Resonators and Electronics Applications
Xingli He,Jian Zhou,Weipeng Xuan,Zhengjia Zhan,Yunjing Zhang,Peng Li,Linghui Kong
DOI: https://doi.org/10.1109/lmwc.2021.3128785
IF: 3
2022-04-01
IEEE Microwave and Wireless Components Letters
Abstract:Ultrahigh-frequency surface acoustic wave (SAW) devices with high quality ($Q$ ) factors are essential components for the next-generation wireless communication system. In this work, we reported high-performance and ultrahigh-frequency SAW devices with single-crystalline LiTaO3/SiO2/Si [LT-on-insulator (LTOI)] multilayered heterostructure. The fabricated SAW resonators exhibited multi-resonant modes (Rayleigh, Sezawa, and LLSAW mode) with the frequency ranging from 1.81 to 8.33 GHz. Especially, the SAW resonator with the Rayleigh wave frequency over 5.0 GHz and high $Q$ value around 2300 with a wavelength of 600 nm was realized. The variation of the phase velocity, the $Q$ factor for each resonant mode, and the effective coupling coefficients ($k^{2}_{\mathrm {eff}}$ ) versus the normalized LiTaO3 film thickness were systematically investigated. The proposed high-frequency SAW based on LTOI multilayered heterostructure possesses the low temperature coefficient of frequency (TCF, −20 ppm/K). Furthermore, a high-performance SAW bandpass filter with the center frequency of ~3.5 GHz was achieved. The work shows the great potential of the LiTaO3 single-crystalline thin-films-based SAW for ultrahigh frequency electronics applications.
engineering, electrical & electronic